MicroElectroMechanical Systems (MEMS) or Microsystems Technology is a rapidly growing, emerging technology, and it has a big potential to reshape life patterns in the future like the microelectronics technology. By utilizing this technology, it is possible to integrate both microelectronic circuits and mechanical structures on the same chip, enabling monolithic integration while reducing the microsystem size and cost considerably.

This technology has an enormous number of application areas, including automotive (accelerometers for airbag systems, roll-over detection systems, etc.), biomedical (neural prosthesis devices like hearing and visual aids, smart drug delivery systems, on chip body fluid analysis systems, microsurgery tools, pacemakers), telecommunication (micromirrors for fiber optic switching for fast internet, smart antennas), household appliances (pressure sensors for water level detection, frost sensors for refrigerators), consumer applications (DLP projectors, i-phone, Nintendo Wii), and defense applications (low cost night vision, smart munitions, homeland security systems).

We all witnessed how the microelectronics technology changed the daily life in the past decades, and the MEMS technology is expected to have a similar effect for the next decades, as the need for smart systems are increasing where low-cost, low-power, and small-size sensors and actuators are required. The MEMS technology is also expected to increase the potential use of nanotechnology in the daily life, while developments in nanotechnology will increase the performance and application areas of MEMS products.